839-101612-887 Tel Electrostatic Chuck ESC

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Essential details：839-101612-887 Tel Electrostatic Chuck ESC

839-101612-887 Tel Electrostatic Chuck ESC is a precision clamping device specifically used in semiconductor manufacturing and microelectronics equipment processing. It uses the principle of electrostatic adsorption to form an electric field on the surface of the chuck by applying voltage, so as to achieve stable clamping of small parts or workpieces.

The main advantages of this electrostatic chuck ESC include:

High-precision clamping: electrostatic chuck can achieve the precise clamping of small parts, the clamping force is uniform and stable, suitable for high-precision machining and testing.

No mechanical contact: Due to the use of electrostatic adsorption, there is no direct mechanical contact between the workpiece and the chuck, avoiding scratches or pollution caused by contact.

839-101612-887

839-101612-887 Tel Electrostatic Chuck ESC

Easy to control: By adjusting the voltage applied to the chuck, the size of the clamping force can be precisely controlled for flexible operation.

Wide range of applications: It is suitable for small parts of various materials and shapes, especially when dealing with fragile or sensitive materials.

High efficiency and energy saving: The static chuck has low power consumption during operation, and the clamping and release process is fast, which improves the production efficiency.

In the semiconductor manufacturing process, electrostatic chuck ESC is often used in wafer processing, chip packaging and other links to ensure the stability and accuracy of the workpiece in the processing process. In addition, it can also be applied to precision measurement, optical component manufacturing and other fields to meet the demand for high-precision clamping of tiny parts.

It should be noted that the use and maintenance of electrostatic chuck ESC requires certain professional knowledge and skills to ensure its normal operation and extend its service life. At the same time, it is also necessary to pay attention to electrostatic safety issues during use to avoid unnecessary damage.